Abstract: This paper presents a discrete power control of a high-frequency power inverter system for plasma generation. Plasma generation requires a high-frequency dc-ac inverter to rapidly adjust the output power in step changes within a few microseconds such as the pulsed plasma in semiconductor processing.
In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The power supply mainly consists of a series resonant converter with a high-frequency high-voltage boost transformer.
1. Introduction High-voltage plasma generating is widely used in industry applications, such as static charge remover, ozone generator for sterilizing, and plastic and metal (ex. Aluminum sheet) surface imprinting processing, and so on. Ozone generator makes use of high-voltage plasma generating to ionize the air and generate Ozone .
In this study, a series load-resonant converter configuration is selected to design and realize a high-voltage plasma generator.
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However, this struc-ture has dificulty securing a high-power factor due to the use of a buck converter in the AC–DC part. The frequency of the high-frequency inverter for plasma …
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Abstract— In this paper, the control method of output-series-connected inverter for plasma generator, which operates at the high switching frequency, is proposed. In the …
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In this manuscript, we presented the simple 4T analog MOS control high voltage high frequency inverter circuit as a plasma power supply using …
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In this manuscript, we presented the simple 4T analog MOS control high voltage high frequency inverter circuit as a plasma power …
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The circuit, comprising a half-bridge inverter switching circuit in series with an inductor, capacitor, and a high-frequency, high-voltage transformer resonant combination, is …
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In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The power supply mainly consists of a series resonant converter with …
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This paper presents a high-voltage high-frequency inverter for atmosphere plasma applications. The proposed system is consisted of a PFC rectifier, a voltage-source full-bridge …
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This paper presents a discrete power control of a high-frequency power inverter system for plasma generation. Plasma generation requires a high-frequency dc-ac inverter to …
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In addition, the proposed plasma power supply has the two-stage structure of a PFC boost converter for a high-power factor, and a high-frequency inverter with a parallel resonant …
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Firstly, the design encompasses a three-level high-frequency inverter main circuit, a three-level high-frequency control main circuit, and …
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Abstract Hydrogen energy plays an important role in achieving carbon neutralization, and plasma induced hydrogen is an effective production method. One challenge …
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Firstly, the design encompasses a three-level high-frequency inverter main circuit, a three-level high-frequency control main circuit, and a high-frequency high-voltage …
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The high-voltage winding of the Plasma transformer is wound on the inner layer with a segmented skeleton and epoxy resin encapsulation. The low voltage winding is on the …
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In this study, a series load-resonant converter configuration is selected to design and realize a high-voltage plasma generator. The circuit, comprising a half-bridge inverter …
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In this paper, a control method for the power conversion system (PCS) of plasma generators connected with a plasma chamber …
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The proposed system is consisted of a PFC rectifier, a voltage-source full-bridge inverter with phase-shift control, a high-voltage high-frequency transformer, and a plasma reactor.
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In this research, a high-frequency high-voltage power supply designed for plasma generator is presented. The power supply mainly …
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